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| Categories | Ceramic Substrate |
|---|---|
| Brand Name: | ZMSH |
| Model Number: | SiC Ceramic Optical Path Board |
| Certification: | rohs |
| Place of Origin: | CHINA |
| MOQ: | 5 |
| Price: | by case |
| Payment Terms: | T/T |
| Delivery Time: | 2-4 weeks |
| Packaging Details: | package in 100-grade cleaning room |
| Material Purity: | SiC ≥ 99.999% |
| Thermal Conductivity: | 120–270 W/(m·K) |
| Refractive Index: | 2.6–2.7 |
| Surface Flatness: | ≤1 μm |
| Surface Roughness (Ra): | ≤0.01 μm |
| Operating Temperature: | -50℃ ~ 500℃ |
| Company Info. |
| SHANGHAI FAMOUS TRADE CO.,LTD |
| Verified Supplier |
| View Contact Details |
| Product List |
SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm
A Silicon Carbide (SiC) Optical Path Board is a high-precision optical substrate manufactured from ultra-high-purity silicon carbide ceramic, specifically designed for dual optical path systems in wafer inspection equipment. It leverages the core material properties of silicon carbide—exceptional hardness, ultra-low coefficient of thermal expansion, high thermal conductivity, and high refractive index—to provide a stable, thermally stable reference platform for optical sensors and imaging systems. Through precision grinding and polishing processes, it achieves nanoscale flatness and surface roughness. Its excellent chemical inertness and high stiffness ensure long-term performance in harsh semiconductor manufacturing environments, significantly enhancing inspection accuracy and equipment reliability.
Parameter Category | Parameter Name | Typical Value/Range |
Material Characteristics | Material Purity | SiC ≥99.999% |
Coefficient of Thermal Expansion | ~4.5×10⁻⁶/℃ | |
Thermal Conductivity | 120–270 W/(m·K) | |
Refractive Index | 2.6–2.7 | |
Elastic Modulus | >400 GPa | |
Functional Characteristics | Surface Flatness | ≤1 μm |
Surface Roughness (Ra) | ≤0.01 μm | |
Operating Temperature | -50℃ ~ 500℃ |
| Feature Category | Parameter Name | Value/Specification |
| Weight Optimization | Ultra-Lightweight | Achieved via structural design and material selection |
| Environmental Stability | Ultra-High Stability | Exceptional resistance to thermal/mechanical stress |
| Thermal Performance | Coefficient of Thermal Expansion | Ultra-Low (e.g., ~4.5×10⁻⁶/℃) |
| Mechanical Property | Stiffness | High (e.g., Elastic Modulus >400 GPa) |
| Material Integrity | Density | High (e.g., ≥3.1 g/cm³) |
| Precision Metrics | Surface Flatness & Parallelism | ≤0.02 mm |
| Dimensional Capability | Maximum Size | 900 × 900 mm |
Silicon Carbide Optical Path Boards are critically applied in the following high-end fields due to their outstanding performance:
ZMSH specializes in the customized services of silicon carbide (SiC) optical path boards. With sufficient reserves of ultra-high-purity silicon carbide raw materials (purity ≥99.999%), and leveraging advanced pressureless sintering and precision machining technologies (such as nanoscale mirror polishing and micro-channel processing), it can precisely control product performance. The company is equipped with fully automated production lines and a strict quality inspection system, supporting one-stop customization from design, prototyping to mass production, covering personalized needs for dimensions, shapes, hole positions, and functional characteristics (e.g., flatness ≤0.02mm). Simultaneously, we possess a comprehensive global logistics network and a rapid response mechanism to ensure efficient order delivery, providing high-reliability and high-performance silicon carbide ceramic solutions for fields such as semiconductors, optoelectronics, and new energy.
1. Q: What are the key advantages of silicon carbide (SiC) optical path boards?
A: They offer ultra-low thermal expansion (~4.5×10⁻⁶/℃), high thermal conductivity (120–270 W/m·K), and exceptional stiffness (>400 GPa), ensuring nanoscale flatness (≤0.02mm) and stability under extreme conditions for precision optical systems.
2. Q: Where are silicon carbide optical path boards commonly used?
A: They are primarily used in semiconductor wafer inspection equipment (e.g., dual-optical-path baseplates), AR/VR waveguide substrates, laser interferometers, and high-power photonic devices due to their ability to maintain optical alignment and thermal stability.
Tags: #SiC Ceramic Optical Path Board, #Customized, #Wafer
Inspection Equipment, #Parallelism ≤0.02mm
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