Inline PTFE Fluoropolymer Chemical Heater For Semiconductor Wet Processes

Fluoropolymer (PTFE) Inline Chemical Heater For Semiconductor Wet Processes

Now heat semiconductor process fluids up to 210°C!

PRODUCT DESCRIPTION

Unmatched in Semiconductor process fluid heating. Single chamber sizes up to 18kW

• FEATURES

  • 1. Ruggedly designed for the most demanding recirculation or single pass chemical applications.

  • 2. Able to achieve the highest temperature heating, up to 210°C.

  • 3. All fluoropolymer wetted surfaces for virtually any wet chemistry application. Thick walled chamber provides long

  • service life in the harshest high temperature applications.

  • 4. Long heater life for reduced cost of ownership (COO): Patented heater gas purge system continuously removes

  • 5. any chemical permeation and ensures long element life.

  • 6. Certification: CE, UL compliant, Semi S2

• SPECIFICATIONS

  • 1. Power 1,000 watts up to 18,000 watts

    2. Volts 200 to 600 , single or three phase (12kW and larger require three phase)

  • 3. Watt Density: 10 watts per square inch (1.5w/cm2)

  • 4. Fluid Connections: ¼-inch (6mm) to 1-inch (25mm); ½-inch (12mm) to 1-inch (25mm) Super 300 Type Pillar®

  • 5. Element Purge: Small amount of clean dry air (CDA) or N2 gas flows between the metal grounded element and the PTFE sheath. Purge minimizes potential for ionic contamination. Removes chemical permeation for longer service life

• OPTIONS AVAILABLE (CONSULT FACTORY)

  • Horizontally mounted configuration

    
    

  • PVDF high temperature mounting brackets

  • Custom configurations, connections and cable lengths

    
    

  • Capacitive style liquid level verification

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APPLICATIONS

Semiconductor wafer cleaning

Solar/Photovoltaio Wafer Cleaning

Inline chemical heating

​​Safety Features

Liquid level sensor

• Ground wire options

• Over-temperature thermocouple

• Process thermocouple

Inline Chemical Heater	1 Bar	15 psig
Environmental Temperature	5-40°C 100 °C	212 °F
Maximum Pressure	<img data-original="/ueditor/themes/default/images/spacer.gif" alt="page3image53628096" width="0.479980" .479980'="" word_img="file:///page3image53628096" data-cke-saved-src="https://img.esadidasol.com/nimg/df/3e/567d6f16d040326c7a0ea29a4f41.jpg" src="https://img.esadidasol.com/nimg/df/3e/567d6f16d040326c7a0ea29a4f41.jpg" style="border: 1px solid rgb(221, 221, 221); vertical-align: top; background-image: url(&quot;http://www.preciseheater.com/ueditor/themes/default/images/word.gif&quot;); background-position: center center; background-repeat: no-repeat no-repeat;"> 5.5 Bar	80 psig
Minimum Flow Rate	2 LPM	.53 GPM
ICB — 12 Mo Warranty
Maximum Fluid Temperature	200 °C	392 °F
Maximum Pressure	3.1 Bar	45 psig

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Guangzhou Precise Heater Co.,LTD is a global, China-based company focused on designing and manufacturing world-class thermal and power supply products. We are committed to creating quality products that are safe, precise, and clean for the industries we serve.

We serve the semiconductor, solar, medical, automotive, aerospace, printed circuit board, flat panel display, jewelry/watch, electroplating, and aquaculture industries.

Precise Heater, established in 1992, serves industries that include Semiconductor, Flat Panel Display (FPD), Microelectromechanical (MEMS), Nanotechnology, Photovoltaic (PV, solar cell), Liquid Crystal Display (LCD), Biomedical and Pharmaceutical. Precise Heater’s product offering includes LUFRAN™ Fluoropolymer DI Water and Chemical Heaters, Quartz DI Water Heaters, Fluoropolymer & Quartz inline Chemical Heaters, Electric Immersion Heaters, Immersion Coils Heat exchangers, High-temperature Filter Chambers, Solvent heaters, Nitrogen heaters, and Rectifier Power Supplies. Semi S2/S3 and CE compliant; ETL/UL and NRTL certified. ISO 9001:2008, including design. The Precise Heater Headquarters and product development center is based in Guangzhou,Guangdong Province,China.

As a World-Class Industrial Technology and thermal products leader, PreciseHeater designs and manufactures heating solutions consisting primarily of electric resistive heaters, temperature sensors, temperature and power controllers and supporting software – all the components of a thermal system. We partner with our customers to optimize thermal performance, decrease design time and improve the efficiency of products and applications.

We bring 30 years of experience to numerous industries, including semiconductor processing, clean environmental technology, energy generation, diesel emissions, medical and food service equipment.